F03800 - SEMI F38 - ユースポイントガスフィルタの効率資格付けを目的とした試験方法 StdTier-Tier1 • the cylinder preparation process

Name: F03800 - SEMI F38 - ユースポイントガスフィルタの効率資格付けを目的とした試験方法 StdTier-Tier1 • the cylinder preparation process
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Description

• the cylinder preparation process and in-situ reactions of diborane with the internal surface of the cylinder

• Test wafers (refer to SEMI M8)

SEMI E68-0997 (Reapproved 1103)

SEMI E173-0415 (first published)

SEMI E5-0200A (technical revision)

F03800 - SEMI F38 - ユースポイントガスフィルタの効率資格付けを目的とした試験方法 StdTier-Tier1 • the cylinder preparation processglobal Gases Committee2011513global Audits and Reviews Subcommittee20116www. semiviews. org www. semi. org19996200411 : POU Referenced SEMI Standards None.

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